Automated XPS Analysis of Passivated Stainless Steel to the SEMI Standard

Publication Information:

Mustonen, O., T.S. Nunney, B.R. Strohmeier, J.D. Piasecki and R.J. Lee, Automated XPS Analysis of Passivated Stainless Steel to the SEMI Standard, presented at the 13th European Conference on Applications of Surface and Interface Analysis, Antalya, Turkey, and presented at the American Vacuum Society 56th International Symposium & Exposition, 2009, San Jose, CA.

Year: 2009