Publications

Automated XPS Analysis of Passivated Stainless Steel to the SEMI Standard

Publication Information:

Mustonen, O., T.S. Nunney, B.R. Strohmeier, J.D. Piasecki, and R.J. Lee, “Automated XPS Analysis of Passivated Stainless Steel to the SEMI Standard”, presented at the 13th European Conference on Applications of Surface and Interface Analysis, Antalya, Turkey, October 2009; and presented at the American Vacuum Society 56th International Symposium & Exposition, San Jose, CA, November 10, 2009.

Year: 2009

Topics: Metals & Alloys