Auger Electron Spectroscopy (AES)
Auger electron spectroscopy is an analytical technique in surface science and materials science.

Auger Electron Spectroscopy (AES) makes use of low energy electrons that are produced when samples are scanned with a focused electron beam. Scanning is carried out using the same technology used to produce an image on a Scanning Electron Microscope. Only those electrons produced in the top few atom layers are able to escape from the surface and be detected. Each element produces Auger electrons having characteristic energies making it possible to determine the composition of the surface, and the number of electrons from a given element can be used to provide information about the relative surface concentration of that element. A profile of the composition with depth can be obtained by following the composition of selected elements while ion etching the sample surface using an argon ion beam. AES is used extensively to solve bonding, corrosion, and contamination problems.