Computer Controlled Scanning Electron Microscope (CCSEM)
This instrument measures individual particle size, shape, and elemental composition by combining a scanning electron microscope (SEM), an x-ray analyzer (EDS) and a digital scan generator under computer control.

The CCSEM provides simultaneous measurement of individual particle size, shape (aspect ratio) and elemental composition by combining a scanning electron microscope (SEM), an x-ray analyzer (EDS) and a digital scan generator under computer control. Use of the computer to control the analysis permits large numbers of individual inclusions to be analyzed in a time efficient manner (i.e., seconds per particle). A CCSEM analysis is performed by rastering the electron beam over the sample and monitoring the resultant secondary or backscattered signals. A signal above the preset threshold value indicates that a particle has been detected. Size information is obtained by tracing the dimensions of the detected particle with the electron beam while characteristic x-rays are collected and processed using EDS analysis techniques. All information obtained during the analysis is summarized and recorded on computer media. Individual particles characterized during a CCSEM analysis can be grouped into particle type (species) classes based on their elemental composition and shape. The CCSEM particle class data can then be summarized into number distribution and mass distribution tables.